软物质微纳加工实验室

时间:2018-03-14浏览:2399设置

软纳米平台Soft NanoLabSNL)是专门为了研发各类软材料、将软材料制备成各种应用器件,而创建的一个微纳加工共享平台;本平台全名为:软物质微纳加工实验室Soft Matter Nanofabrication Laboratory)。本平台实验室位于物质学院7号楼一层南侧,性质为电子厂房净化室,包含千级和万级两个洁净区域,共占地650平方米;本平台为小规模、高水平微纳加工实验室,将提供最先进的微纳加工设备,主要功能有光刻、蚀刻、薄膜、和器件封装与测试,专为新型软物质的器件开发提供支撑性科研服务。


软纳米平台既是物质科学与技术学院三大科研支撑平台之一,同时,也是上海科技大学重点科研资源平台之一。由上海市政府提供建设经费,在上海科技大学相关部门的合作及指导下,本平台由物质科学与技术学院主要负责相关规划筹建、以及运行。本平台的建设构想由物质科学与技术学院创建院长杨培东院士提出,主要为新能源、新生物、新量子科学发展,为不同领域的软材料器件研究提供最先进的微纳加工能力;此外,软纳米平台作为一校级大型设备共享平台,不仅对校内全面开放,更将鼓励校内外科研合作或业界产品开发,满足微纳加工需求,以实现“推进科技进步驱动产业发展”的创新价值。未来软纳米平台将致力成为一个集学、研、制、测一体化的科研平台,作为上海科技大学的科研保障基地之一。


平台主页链接:http://eshare.shanghaitech.edu.cn/spst/rnm/


Soft Matter Nanofabrication Laboratory, as we would abbreviate it as Soft NanoLab (SNL), is one of major shared platforms at ShanghaiTech University. This platform was founded in 2017 and the aim is to accelerate the research and development for soft materials and their device-level applications. Soft NanoLab is located in the south side of the 1ST floor in the Building #7, of the School of Physical Science and Technology (SPST). It is a clean room for microelectronics manufacturing, and the clean room area is ~650 square meter consisting of Class 1,000 and Class 10,000 areas, specifically. Soft NanoLab considers itself as a small-scale yet high-standard platform, serving its users with state-of-the-art tools of lithography, etching, thin film growth, and packaging/testing. Our micro/nanofabrication tools are specifically for bolstering research regarding rising soft matter with potentials for future applications.


Soft NanoLab is one of the three research centers and shared platforms in the School of Physical Science and Technology. Meanwhile, it is also one of key shared resource for research at ShanghaiTech. With the financial support from Shanghai Municipal People’s Government, and with synergistic efforts of ShanghaiTech’s administrative offices, School of Physical Science and Technology is in charge of founding SNL as well as operating SNL. The initial blueprint of Soft NanoLab was originally depicted by the Founding Dean of SPST, Prof. Peidong Yang. Mainly, Soft NanoLab will provide state-of-the-art micro/nanofabrication capabilities to promote next-generation devices using soft materials for applications particularly in energy, biology, and quantum electronics. Being a major platform at a university-level, Soft NanoLab is not only open to users across the campus, but also to external users. By sharing complete capabilities in device research, Soft NanoLab encourages both academic and industrial collaborations on soft materials in their pathways towards applications. Soft NanoLab will devote future efforts in integrating functions in teaching/learning, researching, fabricating/testing, and demonstrating, in order to become a top-notch platform in ShanghaiTech.


More informationhttp://eshare.shanghaitech.edu.cn/spst/rnm/


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1

等离子体增强化学气相沉积PECVD

OXFORD NGP80 PECVD  


OXFORD NGP80 PECVD

OXFORD

已购置

2

原子层沉积系统

Atomic Layer Deposition  


Savannah

VEECO

2019年招投标

3

电子束蒸发

E-beam Evaporator  


PRO Line PVD 75

Kurt J. Lesker  

2019年招投标

4

磁控溅射系统

Magnetron sputtering system


PRO Line PVD 75

Kurt J. Lesker   

已购置

5

快速热处理系统

Rapid Thermal Annealer


AccuThermo AW610  

Allwin21.corp

已购置

6

台阶仪

Surface Profiler


Dektak XT

BrukerStylus Profiler  

已购置

7

椭偏仪

Ellipsometer


SE850DUV

SENTECH

2019年招标

8

光学显微镜

Optical Microscope


Axio Lab.A1ZEISS

ZEISS

已购置

9

原子力显微镜

Atomic Force Microscope  


Cypher S

Asylum Research

已购置

10

膜厚测量系统

Film Thickness Measurement System


TohoSpec3100  

Toho Technology Corporation/Japan

已购置

11

半导体器件分析仪

Semiconductor Parameter Analyzer  


KeySight B1500A

Keysight Technologies

已购置

12

探针台

Probe Station


Signatone S1160  

Signatone

已购置

13

聚合物光刻系统

Polymer Pen Lithography System


TERA-print M

TERA-print

已购置

14

临界点干燥仪

Critical Point Dryer  


Tousimis Autosamdri-815B Series C  

Tousimis

已购置

15

晶圆切割机

Wafersaw


DISCO DAD323


已购置

16

接触角

Contact Angle Measurement Instrument (tensiometer)


SL200KS

Kino  

已购置

17

微控楔键合机

Wirebonder


West Bond 7476E

West Bond

已购置

18

腐蚀清洗台

Wet Bnech


SFQ-604SKSX

中国电子科技集团公司第四十五研究所

已购置

19

烤胶机-1

Hot plate-1


Mycro HP1000-1+Rocker300

Mycro

已购置

20

烤胶机-2

Hot plate-2


Mycro NDK-1K

Mycro

已购置

21

紫外曝光机

Ultraviolet exposure machine-1


SÜSS MJB4  


已购置

22

激光直写光刻系统

Laser direct writing lithography system


Quantum Design Microwriter ML3  


已购置

23

3D共聚焦激光显微镜

3D Material Confocal Microscope


Zeiss LSM800

Zeiss

已购置

24

氦离子聚焦离子束显微镜

Helium Ion Microscope‐Focused Ion Beam  


Zeiss ORION NanoFab  

Zeiss

采购中

25

HMDS真空烘箱

HMDS Oven


Yes 310TA  


已购置

26

匀胶旋涂仪

Spin Coater  


Laurell WS 650  


已购置

27

Wafab显影槽

Wafab Developing Bench


Wafab Manual  


已购置

28

Wafab剥离槽

Wafab Lift-off Bench


Wafab Manual  


已购置

29

Wafab湿式清洗槽

Wafab Acid Etching Bench


Wafab Manual  


已购置

30

甩干机

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奥曼特

已购置

31

反应离子刻蚀

Reactive Ion Etch


Advanced Vacuum VISION 322   


已购置

32

离子束刻蚀

Ion Beam Mill  


Intlvac Nanoquest I  


已购置

33

薄膜应力测试系统

Stress measurement system


Toho FLX2320S


已购置

34

紫外固化炉

UV-Ozone


Samco UV-2


已购置




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